Metal-containing diamond-like nanocomposite temperature sensors

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Diamond-like Nanocomposite (DLN) Films for Microelectro-Mechanical System (MEMS)

Diamond-like nanocomposite (DLN) thin films were deposited on pyrex glass or silicon substrate by plasma enhanced chemical vapor deposition (PECVD) method. These types of films have their unique number of structural, mechanical and tribological properties, which are quite similar with MEMS material properties. DLN films provide a number of unique and

Diamond-Like Nanocomposite Coatings for LIGA-Fabricated Nickel Alloy Parts

A commercial plasma enhanced chemical vapor deposition (PECVD) technique with planetary substrate rotation was used to apply a thin (200-400 nm thick) conformal diamond-like carbon (DLC) coating (known as a diamond-like nanocomposite (DLN)) on LIGA fabricated Ni-Mn alloy parts. The PECVD technique is known to overcome the drawbacks associated with the line-of-sight nature of physical vapor depo...

Nitrogenated diamond-like carbon films for metal tracing

Nitrogenated diamond-like carbon (N:DLC) thin films fabricated with filtered cathodic vacuum arc (FCVA) can have a high sp content. Their superior electrochemical properties such as wide potential window and low background current make them a more promising electrode material than conventional carbon-based electrodes. The N:DLC films give pronounced signals for tracing analysis of Pb, Cu and Hg...

Low temperature internal friction of diamond-like carbon films

We have studied the internal friction of amorphous diamond-like carbon films prepared by pulsed-laser deposition from 0.4 to 300K. The low temperature internal friction below 10K is dominated by the atomic tunnelling states for amorphous solids, which is a measure of structure disorder. We have tried to vary the content of sp carbon atoms versus sp ones by changing laser fleunce, by doping with...